Date of Graduation

5-2009

Document Type

Thesis

Degree Name

Bachelor of Science in Mechanical Engineering

Degree Level

Undergraduate

Department

Mechanical Engineering

Advisor

Zou, Min

Reader

Gordon, Matthew H.

Abstract

One- and two-dimensional silicon nanostructures, such as nanodots, nanowires, and surface topography, have potential uses in a variety of fields, including microelectronics, photonics, and tribology. In this thesis research, nickel-induced crystallization (NIC) of amorphous silicon (a-Si) was investigated to determine the suitability of NIC of a-Si to produce silicon nanostructures on silicon substrates. The results show that formation of both surface topography and nanowires is possible with NIC of a-Si. In addition, the formation of nanostructures is very sensitive to Ni thickness, and the resulting nanostructures and films display a high degree of repeatability. The results obtained from this research provide a solid foundation for future studies in NIC of a-Si.

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