Document Type
Patent
Publication Date
12-5-2006
Abstract
Microcavities and micropores that are microscopic (mm) in width and depth and contain any number of individually-addressable electrodes separated by insulators along the walls of each cavity are described. The conducting materials, and the insulator materials can be deposited alternately onto a starting substrate, which is typically an oxidized silicon wafer or polyimide film, but may be any substrate that shows good adhesion to the materials layered on it. The cavities are etched through these layers, perpendicular to the plane of the substrate, exposing the layers at their edges. Pores may be carved entirely through the device.
Department
Chemistry & Biochemistry
Patent Number
US7144486
Application Filed
12-12-2001
Assignee
Board of Trustees of the University of Arkansas (Little Rock, AR)
Citation
Fritsch, I., Henry, C. S., Bowen, B. P., Vandaveer, W. R., & Bratcher, N. (2006). Multilayer microcavity devices and methods. Patents Granted. Retrieved from https://scholarworks.uark.edu/pat/111
Comments
Ingrid Fritsch, Department of Chemistry and Biochemistry, University of Arkansas, Fayetteville, AR
Charles S. Henry, Department of Chemistry and Biochemistry, University of Arkansas, Fayetteville, AR
Walter R. Vandaveer, Department of Chemistry and Biochemistry, University of Arkansas, Fayetteville, AR