Document Type

Patent

Publication Date

12-5-2006

Abstract

Microcavities and micropores that are microscopic (<1 mm) in width and depth and contain any number of individually-addressable electrodes separated by insulators along the walls of each cavity are described. The conducting materials, and the insulator materials can be deposited alternately onto a starting substrate, which is typically an oxidized silicon wafer or polyimide film, but may be any substrate that shows good adhesion to the materials layered on it. The cavities are etched through these layers, perpendicular to the plane of the substrate, exposing the layers at their edges. Pores may be carved entirely through the device.

Department

Chemistry and Biochemistry

Patent Number

US7144486

Application Filed

12-12-2001

Assignee

Board of Trustees of the University of Arkansas (Little Rock, AR)

Comments

Ingrid Fritsch, Department of Chemistry and Biochemistry; Charles S. Henry, Department of Chemistry and Biochemistry; Walter R. Vandaveer, Department of Chemistry and Biochemistry

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