Document Type
Patent
Publication Date
9-26-2006
Abstract
The surface of a semiconductor material, e.g., gallium arsenide, is passivated by irradiating the surface with ultra-short laser pulses, until a stable passive surface is achieved. The passive surface so prepared is devoid of a superficial oxide layer.
Department
Electrical Engineering; Mechanical Engineering
Patent Number
US7112545
Application Filed
9-11-2000
Assignee
Board of Trustees of the University of Arkansas (Fayetteville, AR)
Citation
Railkar, T. A., Malshe, A. P., & Brown, W. D. (2006). Passivation of material using ultra-fast pulsed laser. Patents Granted. Retrieved from https://scholarworks.uark.edu/pat/115
COinS
Comments
Tarak A. Railkar, Department of Mechanical Engineering, University of Arkansas, Fayetteville, AR
Ajay P. Malshe, Department of Mechanical Engineering, University of Arkansas, Fayetteville, AR
William D. Brown, Department of Electrical Engineering, University of Arkansas, Fayetteville, AR