Document Type
Patent
Publication Date
3-10-1998
Abstract
Disclosed are polished and planarized diamond films and a method and apparatus for polishing and planarizing diamond films. The method generally includes mechanical polishing of the diamond film against a ceramic surface in the presence of a treating agent of potassium nitrate and a polishing agent of potassium hydroxide. The produced films have an average surface roughness on the order of 0.05 microns, a planarization uniformity within eight percent, and are relatively free of process-induced contaminants.
Department
Electrical Engineering; Mechanical Engineering
Patent Number
US5725413
Application Filed
5-6-1994
Assignee
Board of Trustees of the University of Arkansas (Little Rock, AR)
Citation
Malshe, A. P., Naseem, H. A., & Brown, W. D. (1998). Apparatus for and method of polishing and planarizing polycrystalline diamonds, and polished and planarized polycrystalline diamonds and products made therefrom. Patents Granted. Retrieved from https://scholarworks.uark.edu/pat/203
Comments
Ajay P. Malshe, Department of Mechanical Engineering, University of Arkansas, Fayetteville, AR
Hameed A. Naseem, Department of Electrical Engineering, University of Arkansas, Fayetteville, AR
William D. Brown, Department of Electrical Engineering, University of Arkansas, Fayetteville, AR