Date of Graduation

5-2025

Document Type

Thesis

Degree Name

Bachelor of Science in Electrical Engineering

Degree Level

Undergraduate

Department

Electrical Engineering

Advisor/Mentor

Ware, Morgan E.

Abstract

The aim of this project is to use deep level transient spectroscopy (DLTS) to energetically evaluate defects by using the carrier concentration dependence on temperature and where these carriers may experience deviation from standard predictions. These defects become apparent through multiple C-V measurements that are swept through a temperature range. By analyzing trends with respect to temperature, the defects can be energetically “located,” and thus identified. This identification can help streamline semiconductor material manufacturing/growth because DLTS identifies potential defect causes by providing data to characterize semiconductor mid-band defects. DLTS can assess nearly all parameters associated with traps/defects including density, thermal cross section, energy level, and their spatial profile/effective density.

Keywords

Deep Level Transient Spectroscopy (DLTS); Silicon Carbide (SiC); Schottky Barrier Diode; Defect Characterization; Semiconductor Traps; Activation Energy

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