Date of Graduation


Document Type


Degree Name

Bachelor of Science in Mechanical Engineering

Degree Level



Mechanical Engineering


Tung, Cha-Hung Steve

Committee Member/Reader

Wejinya, Uchechukwu C.


This thesis details the design, fabrication, and testing of PDMS pneumatic micro-pumps and micro-mixer. Each micro-pump and micro-mixer was fabricated from two layers of poly(dimethlysiloxane) (PDMS) and two glass slides. The PDMS layers were realized through soft lithography using micro molds fabricated from thick SU8 photoresist. The packaged devices were tested for flow rates (micro pump) and rate of mixing (micro-mixer) on a custom-designed test platform. The test result indicated that the micro-pump failed to deliver a measurable flow rate, most likely due to insufficient diaphragm deflection. For the micro-mixer, a slight increase in mixing was detected when the mixer was activated. It can be speculated that even greater mixing could be realized with improved alignment between the mixing chamber and mixer diaphragms. Additionally, an increase in actuation pressure might also increase the mixing efficiency. Overall, the PDMS pneumatic micro-pumps and micro-mixers hold great promise for future lab-on-a-chip systems in biomedical applications.