Document Type
Patent
Publication Date
8-1-2017
Abstract
A process for fabricating a nanochannel system using a combination of microelectromechanical system (MEMS) microfabrication techniques, atomic force microscopy (AFM) nanolithography, and focused ion beam (FIB). The nanochannel system, fabricated on either a glass or silicon substrate, has channel heights and widths on the order of single to tens of nanometers. The channel length is in the micrometer range. The nanochannel system is equipped with embedded micro and nanoscale electrodes, positioned along the length of the nanochannel for electron tunneling based characterization of nanoscale particles in the channel. Anodic bonding is used to cap off the nanochannel with a cover chip.
Department
Biological and Agricultural Engineering; Mechanical Engineering
Patent Number
US9718668
Application Number
US 20170152134 A9
Application Published
6-1-2017
Application Filed
7-26-2013
Assignee
Board of Trustees of the University of Arkansas (Little Rock, AR)
Citation
Tung, C. S., Kim, J., & Busch, T. (2017). Method of fabricating a nanochannel system for DNA sequencing and nanoparticle characterization. Patents Granted. Retrieved from https://scholarworks.uark.edu/pat/322
Comments
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT This invention was made with Government support under ECCS-1137948 awarded by the ECCS division of the National Science Foundation. The Government has certain rights in the invention.
Steve Tung, Department of Mechanical Engineering, University of Arkansas, Fayetteville, AR
Jin-Woo Kim, Department of Biological and Agricultural Engineering, University of Arkansas, Fayetteville, AR