Abstract
Thallination techniques used for the fabrication of sputter-deposited TI2Ba2CaCu 2Ox and TI2Ba2Ca2Cu3Ox superconducting thin films were investigated. Differences in elemental composition of precursor Ba-Ca-Cu-O sputtering targets were found to yield different superconducting phases. Thallination conditions which yielded transition temperatures as high as 122 K for samples annealed in air are described. Finally, reactive ion etching of films using a mixture of chlorine and argon gases is discussed.
Recommended Citation
Dhayagude, T. H.; Ang, S. S.; and Brown, W. D.
(1993)
"Sputter Deposition and Thallination of Ti-Ba-Ca-Cu-O Superconducting Thin Films,"
Journal of the Arkansas Academy of Science: Vol. 47, Article 12.
Available at:
https://scholarworks.uark.edu/jaas/vol47/iss1/12
