A process for fabricating a nanochannel system using a combination of microelectromechanical system (MEMS) microfabrication techniques, atomic force microscopy (AFM) nanolithography, and focused ion beam (FIB). The nanochannel system, fabricated on either a glass or silicon substrate, has channel heights and widths on the order of single to tens of nanometers. The channel length is in the micrometer range. The nanochannel system is equipped with embedded micro and nanoscale electrodes, positioned along the length of the nanochannel for electron tunneling based characterization of nanoscale particles in the channel. Anodic bonding is used to cap off the nanochannel with a cover chip.
Biological and Agricultural Engineering; Mechanical Engineering
US 20140231254 A1
Board of Trustees of the University of Arkansas (Little Rock, AR)
Tung, Steve; Kim, Jin-Woo; and Busch, Taylor, "Method of fabricating a nanochannel system for DNA sequencing and nanoparticle characterization" (2017). Patents Granted. 324.