Date of Graduation

5-2012

Document Type

Thesis

Degree Name

Bachelor of Science

Degree Level

Undergraduate

Department

Mechanical Engineering

Advisor

Zou, Min

Reader

Spearot, Douglas E.

Abstract

Textured surfaces can reduce friction due to decreased contact area between two surfaces, and could therefore increase the reliability of micro-electro-mechanical systems (MEMS). The problem with some microtextures is their inability to withstand significant amounts of wear, often deforming or breaking, thus limiting their potential uses and overall effectiveness. In this study, connected and isolated SU8 microstructures with and without diamond-like coating (DLC) were designed to investigate the effects of these microstructures on the tribological performance of a surface. Friction studies were conducted using a tribometer, while surface topography and wear were characterized by scanning electron microscopy (SEM), optical microscope, and contact profilometry. The results show that the coefficient of friction as well as overall surface wear can be significantly reduced by texturing samples with connected microstructures covered by DLC.

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