Date of Graduation

5-2017

Document Type

Thesis

Degree Name

Master of Science in Microelectronics-Photonics (MS)

Degree Level

Graduate

Department

Microelectronics-Photonics

Advisor/Mentor

Roper, D. Keith

Committee Member

Ware, Morgan E.

Second Committee Member

Wise, Rick L.

Third Committee Member

Selvam, R. Panneer

Keywords

Pure sciences; Applied sciences; Fano resonance; Metamaterials; Plasmonics; Sparsity

Abstract

Metal nanoparticles deposited in regular arrays spaced at optical wavelengths support a resonance due to a coherent coupling between localized surface plasmon mode and lattice diffraction allowing for engineering of tunable devices for use in biological sensors, nanoantennae, and enhanced spectroscopy. Techniques such as electron beam lithography, focused ion beam lithography, nanosphere lithography, and nanoimprint lithography are used for fabrication but are limited by cost, device throughput, and small deposition. Polymer soft lithography and continuous dewetting of particles is a potentially viable alternative showing promise in all of those areas. This thesis developed the fabrication of a refined hydrophilic nanoimprinted polymer substrate with a regular square lattice and characterized the optical response of sparsely deposited nanoparticles by continuous dewetting which permit a diffractive lattice coupling.

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