Date of Graduation
5-2014
Document Type
Dissertation
Degree Name
Doctor of Philosophy in Microelectronics-Photonics (PhD)
Degree Level
Graduate
Department
Microelectronics-Photonics
Advisor/Mentor
Hameed Naseem
Committee Member
Morgan Ware
Second Committee Member
Simon Ang
Third Committee Member
William Oliver III
Fourth Committee Member
Ken Vickers
Keywords
Aluminum Induced Crystalization, Aluminum Nanodots
Abstract
Combining the absorption abilities of amorphous silicon and the electron transport capabilities of crystalline silicon would be a great advantage to not only solar cells but other semiconductor devices. In this work composite films were created using molecular beam epitaxy and electron beam deposition interchangeably as a method to create metallic precursors. Aluminum induced crystallization techniques were used to convert an amorphous silicon film with a capping layer of aluminum nanodots into a film composed of a mixture of amorphous silicon and nanocrystalline silicon. This layer was grown into the amorphous layer by cannibalizing a portion of the amorphous silicon material during the aluminum induced crystallization. Characterization was performed on films and metallic precursors utilizing SEM, TEM, ellipsometry and spectrophotometer.
Citation
Newton, B. S. (2014). Fabrication and Characterization of Amorphous/Nanocrystalline Thin Film Composite. Graduate Theses and Dissertations Retrieved from https://scholarworks.uark.edu/etd/2254