Date of Graduation

8-2023

Document Type

Thesis

Degree Name

Master of Science in Physics (MS)

Degree Level

Graduate

Department

Physics

Advisor/Mentor

Thibado, Paul M.

Committee Member

Skinner, Stephen

Second Committee Member

Joffe-Mino, Tacy

Keywords

Graphene; Variable capacitator; SiO2; EBL; Electron Beam Lithography

Abstract

Following the research done on graphene looking at its unique properties it has been found that graphene can be used as a varying capacitor. What has been observed is that graphene acts almost like a torrential ocean constantly fluctuating. What we use is a silicon wafer with multiple etched layers to create a stable platform on which to capture this energy. In this paper we will discuss the general setup and step-by-step procedures required to create a functioning variable capacitor out of graphene, gold, and Silicon dioxide (SiO2) substrate. Electron Beam Lithography (EBL) is used to create the initial design after which the sample undergoes an etching process in order to adjust the tips to the proper height so that the graphene does not make contact while also balancing the etch time so that the trenches, which will carry the current, aren't destroyed during the process.

Download

Included in

Physics Commons

Share

COinS