Document Type
Patent
Publication Date
1-2-2001
Abstract
A method of processing a substrate by first processing the substrate surface with a laser operating at a first wavelength to both evaporate a portion of the substrate and structurally weaken the substrate surface, and then by processing the substrate surface with a laser operating at a second wavelength to remove the structurally weakened surface.
Department
Biological and Agricultural Engineering; Electrical Engineering; Mechanical Engineering
Patent Number
US6168744
Application Filed
10-8-1997
Assignee
Board of Trustees of the University of Arkansas (Little Rock, AR)
Citation
Malshe, A. P., Ozkan, A. M., & Brown, W. D. (2001). Process for sequential multi-beam laser processing of materials. Patents Granted. Retrieved from https://scholarworks.uark.edu/pat/174
COinS
Comments
Ajay P. Malshe, Department of Mechanical Engineering, University of Arkansas, Fayetteville, AR
Arzu M. Ozkan, Department of Biological and Agricultural Engineering, University of Arkansas, Fayetteville, AR
William D. Brown, Department of Electrical Engineering, University of Arkansas, Fayetteville, AR