Apparatus for and method of polishing and planarizing polycrystalline diamonds, and polished and planarized polycrystalline diamonds and products made therefrom

Inventors

Ajay P. Malshe, University of Arkansas, FayettevilleFollow
Hameed A. Naseem, University of Arkansas, FayettevilleFollow
William D. Brown, University of Arkansas, FayettevilleFollow

Document Type

Patent

Publication Date

3-10-1998

Abstract

Disclosed are polished and planarized diamond films and a method and apparatus for polishing and planarizing diamond films. The method generally includes mechanical polishing of the diamond film against a ceramic surface in the presence of a treating agent of potassium nitrate and a polishing agent of potassium hydroxide. The produced films have an average surface roughness on the order of 0.05 microns, a planarization uniformity within eight percent, and are relatively free of process-induced contaminants.

Department

Electrical Engineering; Mechanical Engineering

Patent Number

US5725413

Application Filed

5-6-1994

Assignee

Board of Trustees of the University of Arkansas (Little Rock, AR)

Comments

Ajay P. Malshe, Department of Mechanical Engineering, University of Arkansas, Fayetteville, AR
Hameed A. Naseem, Department of Electrical Engineering, University of Arkansas, Fayetteville, AR
William D. Brown, Department of Electrical Engineering, University of Arkansas, Fayetteville, AR

Citation

Malshe, A. P., Naseem, H. A., & Brown, W. D. (1998). Apparatus for and method of polishing and planarizing polycrystalline diamonds, and polished and planarized polycrystalline diamonds and products made therefrom. Patents Granted. Retrieved from https://scholarworks.uark.edu/pat/203