Document Type

Patent

Publication Date

9-14-2021

Abstract

One aspect of the disclosure is directed to a method for forming an antireflective coating on a substrate, which includes providing a polymer solution and a silica solution, depositing the polymer solution on a surface of the substrate to forming a polymer film thereon, depositing the silica solution on the formed polymer film on the substrate to form a silica film thereon, thereby forming a stack structure having the silica film formed on the polymer film that is, in turn, formed on the substrate, and drying the stack structure to form the antireflective coating on the substrate, wherein the antireflective coating comprises silica nanoparticles.

Department

Mechanical Engineering

Patent Number

US11121267

Application Number

US 20160005886 A1

Application Published

1-7-2016

Application Filed

3-3-2014

Assignee

Board of Trustees of the University of Arkansas (Little Rock, AR)

Comments

Min Zou, Department of Mechanical Engineering, University of Arkansas, Fayetteville, AR

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