Document Type

Patent

Publication Date

6-18-2024

Abstract

A method of fabricating a sensing device for DNA sequencing and biomolecule characterization including the steps of fabricating a microelectrode chip having a silicon substrate and a silicon nitride diaphragm, attaching a monolayer graphene sheet to the silicon nitride diaphragm, dicing a portion of the monolayer graphene sheet to form a graphene microribbon, converting the graphene microribbon to a graphene nanoribbon, and converting the graphene nanoribbon to a carbyne. A sensing device for DNA sequencing and biomolecule characterization is also disclosed. The sensing device includes a silicon substrate, a cavity in the silicon substrate covered by a silicon nitride layer, microelectrodes attached to the silicon nitride layer, graphene covering the microelectrodes, and carbyne attached to a portion of the silicon nitride layer covering said cavity.

Department

Mechanical Engineering

Patent Number

US12012329

Application Number

US 20210253420

Application Published

8-19-2021

Application Filed

2-11-2021

Assignee

Board of Trustees of the University of Arkansas (Little Rock, AR)

Comments

Steve Tung, Department of Mechanical Engineering, University of Arkansas, Fayetteville, AR
Bo Ma, Department of Mechanical Engineering, University of Arkansas, Fayetteville, AR
Ty Seiwert, Department of Mechanical Engineering, University of Arkansas, Fayetteville, AR

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